The rapid development of semi-conductor industry calls for the production of organometallic precursors with ultrahigh-purity and low cost.TiO2 film is an important high-k materials,but its atomic layer deposition(A...The rapid development of semi-conductor industry calls for the production of organometallic precursors with ultrahigh-purity and low cost.TiO2 film is an important high-k materials,but its atomic layer deposition(ALD)precursor tetrakis(dimethylamino)titanium(TDMAT)still suffers from low industrial synthesis yield and inadequate purity.Herein,by optimizing the lithium displacement method in TDMAT synthesis,much milder synthesis conditions have been achieved with higher yield(91.00%)and ultra-high organic purity(>99.9%).In the purification optimization,a new coupled process combining alkali metal salt and rectification was proposed,based on which ultra-high inorganic purity(99.99993%,Cl-content<10-5,6N)and high TDMAT yield(93.70%)can be obtained.Finally,by using the assynthesized precursor,wafer-scale TiO2 film under ALD process has been fabricated,which was characterized by SEM,EDS,AFM,XPS and spectral ellipsometry(SE).Specially,AFM validates its ultrasmooth surface without any extra holes or agglomerations(RMS:0.303 nm).This work will be significant for the development of ultrahigh-purity semi-conductor materials.展开更多
Selective photocatalytic aerobic oxidation of methane to value-added chemicals offers a promising pathway for sustainable chemical industry,yet remains a huge challenge owing to the consecutive overoxidation of primar...Selective photocatalytic aerobic oxidation of methane to value-added chemicals offers a promising pathway for sustainable chemical industry,yet remains a huge challenge owing to the consecutive overoxidation of primary products.Here,a type II heterojunction were constructed in Ag-AgBr/ZnO to reduce the oxidation potential of stimulated holes and prevent the undesirable CH4 overoxidation side reactions.For photocatalytic oxidation of methane under ambient temperature,the products yield of 1499.6μmol gcat-1 h-1 with a primary products selectivity of 77.9%was achieved over Ag-AgBr/ZnO,which demonstrate remarkable improvement compared to Ag/ZnO(1089.9μmol gcat-1 h-1 ,40.1%).The superior activity and selectivity result from the promoted charge separation and the redox potential matching with methane activation after introducing AgBr species.Mechanism investigation elucidated that the photo-generated holes transferred from the valence band of ZnO to that of AgBr,which prevent H2O oxidation and enhance the selective generation of•OOH radical.展开更多
Polyoxometalates(POMs)have demonstrated strong potential in various fields,such as catalysis,magnetism,medicine,photochemistry and materials science,mainly because of their remarkable physical and chemical properties....Polyoxometalates(POMs)have demonstrated strong potential in various fields,such as catalysis,magnetism,medicine,photochemistry and materials science,mainly because of their remarkable physical and chemical properties.In the broad area of POM chemistry,the study of metal carbonyl-based POMs,as an important type of organometallic POM,has been a rather attractive direction in recent years.展开更多
基金financially supported by the National Natural Science Foundation of China(22078065)Platform Supporting Fund of Qingyuan Innovation Laboratory(00621006,00724001)Quanzhou Science and Technology Program Project(2023FX0003)。
摘要The rapid development of semi-conductor industry calls for the production of organometallic precursors with ultrahigh-purity and low cost.TiO2 film is an important high-k materials,but its atomic layer deposition(ALD)precursor tetrakis(dimethylamino)titanium(TDMAT)still suffers from low industrial synthesis yield and inadequate purity.Herein,by optimizing the lithium displacement method in TDMAT synthesis,much milder synthesis conditions have been achieved with higher yield(91.00%)and ultra-high organic purity(>99.9%).In the purification optimization,a new coupled process combining alkali metal salt and rectification was proposed,based on which ultra-high inorganic purity(99.99993%,Cl-content<10-5,6N)and high TDMAT yield(93.70%)can be obtained.Finally,by using the assynthesized precursor,wafer-scale TiO2 film under ALD process has been fabricated,which was characterized by SEM,EDS,AFM,XPS and spectral ellipsometry(SE).Specially,AFM validates its ultrasmooth surface without any extra holes or agglomerations(RMS:0.303 nm).This work will be significant for the development of ultrahigh-purity semi-conductor materials.
基金supported by the National Natural Science Foundation of China(22208290,22288102,22078288,22225802)the key R&D Program Projects in Zhejiang Province(2021C03005).
摘要Selective photocatalytic aerobic oxidation of methane to value-added chemicals offers a promising pathway for sustainable chemical industry,yet remains a huge challenge owing to the consecutive overoxidation of primary products.Here,a type II heterojunction were constructed in Ag-AgBr/ZnO to reduce the oxidation potential of stimulated holes and prevent the undesirable CH4 overoxidation side reactions.For photocatalytic oxidation of methane under ambient temperature,the products yield of 1499.6μmol gcat-1 h-1 with a primary products selectivity of 77.9%was achieved over Ag-AgBr/ZnO,which demonstrate remarkable improvement compared to Ag/ZnO(1089.9μmol gcat-1 h-1 ,40.1%).The superior activity and selectivity result from the promoted charge separation and the redox potential matching with methane activation after introducing AgBr species.Mechanism investigation elucidated that the photo-generated holes transferred from the valence band of ZnO to that of AgBr,which prevent H2O oxidation and enhance the selective generation of•OOH radical.
基金supported by the National Natural Science Foundation of China(Grants 21571050,21573056,21771053,and 21771054).
摘要Polyoxometalates(POMs)have demonstrated strong potential in various fields,such as catalysis,magnetism,medicine,photochemistry and materials science,mainly because of their remarkable physical and chemical properties.In the broad area of POM chemistry,the study of metal carbonyl-based POMs,as an important type of organometallic POM,has been a rather attractive direction in recent years.