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The milder synthesis and highly-efficient purification of tetrakis(dimethylamino)titanium with ultrahigh-purity for wafer-scale TiO2 film under atomic layer deposition 认领 引用
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作者 Wenjian Xu Zhen Zhang +4 位作者 Yi Lin Jingjing Chen Peipei He Haohong Li Huidong Zheng 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2026年第4期1-10,共10页
The rapid development of semi-conductor industry calls for the production of organometallic precursors with ultrahigh-purity and low cost.TiO2 film is an important high-k materials,but its atomic layer deposition(A... The rapid development of semi-conductor industry calls for the production of organometallic precursors with ultrahigh-purity and low cost.TiO2 film is an important high-k materials,but its atomic layer deposition(ALD)precursor tetrakis(dimethylamino)titanium(TDMAT)still suffers from low industrial synthesis yield and inadequate purity.Herein,by optimizing the lithium displacement method in TDMAT synthesis,much milder synthesis conditions have been achieved with higher yield(91.00%)and ultra-high organic purity(>99.9%).In the purification optimization,a new coupled process combining alkali metal salt and rectification was proposed,based on which ultra-high inorganic purity(99.99993%,Cl-content<10-5,6N)and high TDMAT yield(93.70%)can be obtained.Finally,by using the assynthesized precursor,wafer-scale TiO2 film under ALD process has been fabricated,which was characterized by SEM,EDS,AFM,XPS and spectral ellipsometry(SE).Specially,AFM validates its ultrasmooth surface without any extra holes or agglomerations(RMS:0.303 nm).This work will be significant for the development of ultrahigh-purity semi-conductor materials. 展开更多
关键词 Atomic layer deposition Organometallic precursor Tetrakis(dimethylamino)titanium TiO2thin film Synthesis/purification optimization
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Selective photooxidation of methane to C1 oxygenates by constructing heterojunction photocatalyst with mild oxidation ability 认领 引用 被引量:1
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作者 Hantao Gong Caihao Deng +8 位作者 Peipei He Mingjie Liu Yiliang Cai Yiwen Yang Qiwei Yang Zongbi Bao Qilong Ren Siyu Yao Zhiguo Zhang 《Chinese Journal of Catalysis》 SCIE EI CAS CSCD 2024年第12期61-70,共10页
Selective photocatalytic aerobic oxidation of methane to value-added chemicals offers a promising pathway for sustainable chemical industry,yet remains a huge challenge owing to the consecutive overoxidation of primar... Selective photocatalytic aerobic oxidation of methane to value-added chemicals offers a promising pathway for sustainable chemical industry,yet remains a huge challenge owing to the consecutive overoxidation of primary products.Here,a type II heterojunction were constructed in Ag-AgBr/ZnO to reduce the oxidation potential of stimulated holes and prevent the undesirable CH4 overoxidation side reactions.For photocatalytic oxidation of methane under ambient temperature,the products yield of 1499.6μmol gcat-1 h-1 with a primary products selectivity of 77.9%was achieved over Ag-AgBr/ZnO,which demonstrate remarkable improvement compared to Ag/ZnO(1089.9μmol gcat-1 h-1 ,40.1%).The superior activity and selectivity result from the promoted charge separation and the redox potential matching with methane activation after introducing AgBr species.Mechanism investigation elucidated that the photo-generated holes transferred from the valence band of ZnO to that of AgBr,which prevent H2O oxidation and enhance the selective generation of•OOH radical. 展开更多
关键词 Selective methane oxidation Photocatalysis Heterojunction Ag-AgBr/ZnO catalyst
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Polyoxometalate-supported metal carbonyl derivatives:from synthetic strategies to structural diversity and applications 认领 引用 被引量:4
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作者 Jingkun Lu Peipei He +1 位作者 Jingyang Niu Jingping Wang 《Inorganic Chemistry Frontiers》 SCIE EI 2019年第11期3041-3056,共16页
Polyoxometalates(POMs)have demonstrated strong potential in various fields,such as catalysis,magnetism,medicine,photochemistry and materials science,mainly because of their remarkable physical and chemical properties.... Polyoxometalates(POMs)have demonstrated strong potential in various fields,such as catalysis,magnetism,medicine,photochemistry and materials science,mainly because of their remarkable physical and chemical properties.In the broad area of POM chemistry,the study of metal carbonyl-based POMs,as an important type of organometallic POM,has been a rather attractive direction in recent years. 展开更多
关键词 synthetic strategies polyoxometalates structural diversity metal carbonyl derivatives applications
光驱动有机合成:医药化工绿色发展机遇与挑战 认领 引用
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作者 刘明杰 蔡翼亮 +10 位作者 施瑞晨 贺一鸣 何佩佩 孙扬建 高晓峰 洪龙城 姚思宇 鲍宗必 杨启炜 任其龙 张治国 《中国科学:化学》 CAS CSCD 北大核心 2025年第9期2828-2859,共32页
医药化工是保障现代社会健康发展的重要基础.在全球可持续发展转型浪潮中,推进医药化工产业的低碳化转型不仅是我国实现“双碳”目标的重要任务,更是发展新型制药技术的核心目标.化学原料药生产作为医药化工生产的核心环节,具有能耗高... 医药化工是保障现代社会健康发展的重要基础.在全球可持续发展转型浪潮中,推进医药化工产业的低碳化转型不仅是我国实现“双碳”目标的重要任务,更是发展新型制药技术的核心目标.化学原料药生产作为医药化工生产的核心环节,具有能耗高、碳排放量大等特点,已成为制约医药行业可持续发展的瓶颈.因此构建基于可再生能源驱动的化学合成体系具有重要意义.受自然界中光合作用过程启发构建人工光合系统,利用太阳光驱动化学反应进行,能有效降低反应温度、缩减反应流程,为医药化工的节能化改造提供了新思路.本文面向人工光合技术在医药原料及中间体合成的应用,梳理了该技术的研究与产业化实践进展,尝试提出“光驱动有机合成”概念,并建立涵盖光驱动反应机制、催化剂开发以及工业化应用等多维度的理论框架,为推动绿色制药技术的发展提供理论基础与技术路线. 展开更多
关键词 光催化 医药化工 低碳化 规模化合成 光驱动有机合成 人工光合
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