With the development of electronic equipment to high accuracy, high density, high frequency, and atrocious ser- vice environment, the functional surface in this type of equipment has increasingly serious problems,
Dual-beam interference lithography is a core technology for two-dimensional(2D)grating fabrication.However,significant morphological deviations occur between the fabricated structures and traditional theoretical model...Dual-beam interference lithography is a core technology for two-dimensional(2D)grating fabrication.However,significant morphological deviations occur between the fabricated structures and traditional theoretical models,causing diffraction efficiency prediction discrepancies.To address this issue,this paper proposes a hole–pillar coupled design model for 2D gratings fabricated via dual-beam interference lithography.By constructing the actual three-dimensional(3D)grating morphology,the proposed model describes the grating profile evolution during fabrication accurately.Using an inverse grating design method based on the Fourier modal method,a polarization-independent 2D grating structure with high diffraction efficiency was optimized for a 670 nm working wavelength.A 2D grating with a line density of 1200 gr/mm was fabricated using dual-beam interference lithography.Experimental results show that,when transverse electricransverse magnetic-polarized light at 670 nm is perpendicularly incident,the diffraction efficiency of the(±1,0)and(0,±1)orders exceeds 20%,with a polarization imbalance of less than 3%.Atomic force microscopy characterization reveals a correlation coefficient of 0.988 between the actual and designed grating structures,verifying the proposed model's accuracy.The model provides a precise description of the groove profile in 2D holographic gratings,expands the grating fabrication tolerance,and provides a theoretical foundation for the development of next-generation nanoscale-precision multi-degree-of-freedom measurement systems.展开更多
The secondary coupling supporting technique on key parts (SCSTKP) is put forward. Based on the coupling state between supporting structure and surrounding rock of roadway, the key parts are divided into four types, an...The secondary coupling supporting technique on key parts (SCSTKP) is put forward. Based on the coupling state between supporting structure and surrounding rock of roadway, the key parts are divided into four types, and the characteristics of each type are described. The method to determine the optimum supporting time is also presented.展开更多
A barcode-like waveguide nanostructure with discretized multilevel pixel lines is designed and optimized by a nonlinear search algorithm. We obtain the design of a one-dimensional multilevel nanostructure with-1.04 d ...A barcode-like waveguide nanostructure with discretized multilevel pixel lines is designed and optimized by a nonlinear search algorithm. We obtain the design of a one-dimensional multilevel nanostructure with-1.04 d B efficiency for surface normal coupling to a standard single-mode fiber. Another design is achieved from the automatic optimization process, which enables polarization-independent coupling to a single-mode fiber. The optimum coupling efficiency is simulated to be-2.83 dB for TE and-3.49 for TM polarization centered near the 1550 nm wavelength. Polarization-dependent loss of less than 1 dB over 45.3 nm is achieved.展开更多
The residual stress generated in the manufacturing process of inertial platform causes the drift of inertial platform parameters in long-term storage condition.However,the existing temperature cycling experiment could...The residual stress generated in the manufacturing process of inertial platform causes the drift of inertial platform parameters in long-term storage condition.However,the existing temperature cycling experiment could not meet the increased repeatability technical requirements of inertial platform parameters.In order to solve this problem,in this paper,firstly the Unigraphics(UG) software and the interface compatibility of ANSYS software are used to establish the inertial platform finite element model.Secondly,the residual stress is loaded into finite element model by ANSYS function editor in the form of surface loads to analyze the efficiency.And then,the generation based on ANSYS simulation inertial platform to accelerate the stability of experiment profile is achieved by the application of the analysis method of orthogonal experimental design and ANSYS thermal-structural coupling.The optimum accelerated stability experiment profile is determined finally,which realizes the rapid,effective release of inertial platform residual stress.The research methodology and conclusion of this paper have great theoretical and practical significance to the production technology of inertial platform.展开更多
In this paper,size and shape optimization problem of a machine gun system is addressed with an efficient hybrid method,in which a novel and flexible mesh morphing technique is employed to achieve fast parameterization...In this paper,size and shape optimization problem of a machine gun system is addressed with an efficient hybrid method,in which a novel and flexible mesh morphing technique is employed to achieve fast parameterization and modification of complexity structure without going back to CAD for reconstruction of geometric models or to finite element analysis( FEA) for remodeling. Design of experiments( DOE) and response surface method( RSM) are applied to approximate the constitutive parameters of a machine gun system based on experimental tests. Further FEA,secondary development technique and genetic algorithm( GA) are introduced to find all the optimal solutions in one go and the optimal design of the demonstrated machine gun system is obtained. Results of the rigid-flexible coupling dynamic analysis and exterior ballistics calculation validate the proposed methodology,which is relatively time-saving,reliable and has the potential to solve similar problems.展开更多
A compact optical flip-flop with a directional coupler has been designed and analyzed. Using a narrow gap directional coupler, we have predicted the device length could be reduced down to 500μm from 1300μm.
摘要With the development of electronic equipment to high accuracy, high density, high frequency, and atrocious ser- vice environment, the functional surface in this type of equipment has increasingly serious problems,
基金Youth Innovation Promotion Association of the Chinese Academy of Sciences(2022218)Strategic Priority Research Program of the Chinese Academy of Sciences(XDC0280101)+3 种基金National Natural Science Foundation of China(62435019)CAS Project for Young Scientists in Basic Research(YSBR-103)National Key Research and Development Program of China(2023YFF0715802)Jilin Province and Chinese Academy of Sciences Science and Technology Cooperation High-Tech Industrialization Special Program(2024SYHZ0018)。
摘要Dual-beam interference lithography is a core technology for two-dimensional(2D)grating fabrication.However,significant morphological deviations occur between the fabricated structures and traditional theoretical models,causing diffraction efficiency prediction discrepancies.To address this issue,this paper proposes a hole–pillar coupled design model for 2D gratings fabricated via dual-beam interference lithography.By constructing the actual three-dimensional(3D)grating morphology,the proposed model describes the grating profile evolution during fabrication accurately.Using an inverse grating design method based on the Fourier modal method,a polarization-independent 2D grating structure with high diffraction efficiency was optimized for a 670 nm working wavelength.A 2D grating with a line density of 1200 gr/mm was fabricated using dual-beam interference lithography.Experimental results show that,when transverse electricransverse magnetic-polarized light at 670 nm is perpendicularly incident,the diffraction efficiency of the(±1,0)and(0,±1)orders exceeds 20%,with a polarization imbalance of less than 3%.Atomic force microscopy characterization reveals a correlation coefficient of 0.988 between the actual and designed grating structures,verifying the proposed model's accuracy.The model provides a precise description of the groove profile in 2D holographic gratings,expands the grating fabrication tolerance,and provides a theoretical foundation for the development of next-generation nanoscale-precision multi-degree-of-freedom measurement systems.
摘要The secondary coupling supporting technique on key parts (SCSTKP) is put forward. Based on the coupling state between supporting structure and surrounding rock of roadway, the key parts are divided into four types, and the characteristics of each type are described. The method to determine the optimum supporting time is also presented.
基金National Natural Science Foundation of China(NSFC)(61505039)Shenzhen Municipal Science and Technology Plan Project(JCYJ20150403161923530)
摘要A barcode-like waveguide nanostructure with discretized multilevel pixel lines is designed and optimized by a nonlinear search algorithm. We obtain the design of a one-dimensional multilevel nanostructure with-1.04 d B efficiency for surface normal coupling to a standard single-mode fiber. Another design is achieved from the automatic optimization process, which enables polarization-independent coupling to a single-mode fiber. The optimum coupling efficiency is simulated to be-2.83 dB for TE and-3.49 for TM polarization centered near the 1550 nm wavelength. Polarization-dependent loss of less than 1 dB over 45.3 nm is achieved.
摘要The residual stress generated in the manufacturing process of inertial platform causes the drift of inertial platform parameters in long-term storage condition.However,the existing temperature cycling experiment could not meet the increased repeatability technical requirements of inertial platform parameters.In order to solve this problem,in this paper,firstly the Unigraphics(UG) software and the interface compatibility of ANSYS software are used to establish the inertial platform finite element model.Secondly,the residual stress is loaded into finite element model by ANSYS function editor in the form of surface loads to analyze the efficiency.And then,the generation based on ANSYS simulation inertial platform to accelerate the stability of experiment profile is achieved by the application of the analysis method of orthogonal experimental design and ANSYS thermal-structural coupling.The optimum accelerated stability experiment profile is determined finally,which realizes the rapid,effective release of inertial platform residual stress.The research methodology and conclusion of this paper have great theoretical and practical significance to the production technology of inertial platform.
基金Supported by the National Natural Science Foundation of China(51376090,51676099)
摘要In this paper,size and shape optimization problem of a machine gun system is addressed with an efficient hybrid method,in which a novel and flexible mesh morphing technique is employed to achieve fast parameterization and modification of complexity structure without going back to CAD for reconstruction of geometric models or to finite element analysis( FEA) for remodeling. Design of experiments( DOE) and response surface method( RSM) are applied to approximate the constitutive parameters of a machine gun system based on experimental tests. Further FEA,secondary development technique and genetic algorithm( GA) are introduced to find all the optimal solutions in one go and the optimal design of the demonstrated machine gun system is obtained. Results of the rigid-flexible coupling dynamic analysis and exterior ballistics calculation validate the proposed methodology,which is relatively time-saving,reliable and has the potential to solve similar problems.
摘要A compact optical flip-flop with a directional coupler has been designed and analyzed. Using a narrow gap directional coupler, we have predicted the device length could be reduced down to 500μm from 1300μm.