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Continuous displacement measurement of large spot with stitched gratings 认领 引用
1
作者 WANG Bo WANG Wei +5 位作者 YIN Zhi-yu WANG Xin-yu LIU Zhao-wu LI Wen-hao GAO Xu LIU Lin 《中国光学（中英文）》 EI CAS CSCD 北大核心 2026年第4期971-982,共12页
Stitched gratings provide an important method to extend the grating displacement measurement range.However,the existence of stitched seams and stitching errors prevents high-precision continuous displacement measureme... Stitched gratings provide an important method to extend the grating displacement measurement range.However,the existence of stitched seams and stitching errors prevents high-precision continuous displacement measurement.This paper proposes an improved stitched grating displacement measurement method which reduces light signal intensity loss during stitching via a large spot suppression technique,ensures continuous displacement measurement using wavefront gradient modulation technology,establishes a theoretical model of the mapping between the stitched grating wavefront and the displacement measurement error,and verifies continuous displacement measurements experimentally using a single-sided Littrow optical path.Experimental results show that,based on the premise of matching the wavefront gradient index,the linear correlation between the theoretical model error and the actual measurement residual is greater than 0.9,and the corrected continuous displacement measurement residual is less than 50 nm.This verifies that the proposed method can realize high-precision continuous displacement measurement and high-stability range extension in the grating displacement measurement field. 展开更多
关键词 grating displacement measurement grating interferometer stitching grating wavefront measurement
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Design of Differential Signal Processing Circuitry for Single-Frequency Laser Interferometry Displacement Measurement 认领 引用
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作者 Songxiang Liu Jingping Yan Can Tang 《Journal of Electronic Research and Application》 2025年第2期258-267,共10页
This thesis addresses the issues existing in traditional laser tracking displacement measurement technology in the field of ultraprecision metrology by designing a differential signal processing circuit for high-preci... This thesis addresses the issues existing in traditional laser tracking displacement measurement technology in the field of ultraprecision metrology by designing a differential signal processing circuit for high-precision laser interferometric displacement measurement.A stable power supply module is designed to provide low-noise voltage to the entire circuit.An analog circuit system is constructed,including key circuits such as photoelectric sensors,I-V amplification,zero adjustment,fully differential amplification,and amplitude modulation filtering.To acquire and process signals,the PMAC Acc24E3 data acquisition card is selected,which realizes phase demodulation through reversible square wave counting,inverts displacement information,and a visual interface for the host computer is designed.Experimental verification shows that the designed system achieves micrometer-level measurement accuracy within a range of 0-10mm,with a maximum measurement error of less than 1.2μm,a maximum measurement speed of 6m/s,and a resolution better than 0.158μm. 展开更多
关键词 Displacement Measurement Weak Signal Processing Differential Signal Data Acquisition
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Review of Electronic Speckle Pattern Interferometry(ESPI) for Three Dimensional Displacement Measurement 认领 引用 被引量：25
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作者 YANG Lianxiang XIE Xin +2 位作者 ZHU Lianqing WU Sijin WANG Yonghong 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2014年第1期1-13,共13页
Three dimensional（3D） displacements, which can be translated further into 3D strain, are key parameters tor design, manufacturing and quality control. Using different optical setups, phase-shift methods, and algorit... Three dimensional（3D） displacements, which can be translated further into 3D strain, are key parameters tor design, manufacturing and quality control. Using different optical setups, phase-shift methods, and algorithms, several different 3D electronic speckle pattern interferometry（ESPl） systems for displacement and strain measurements have been achieved and commercialized. This paper provides a review of the recent developments in ESPI systems for 3D displacement and strain measurement. After an overview of the fundamentals of ESP! theory, temporal phase-shift, and spatial phase-shift techniques, 3D deformation measurements by the temporal phase-shift ESPI system, which is suited well for static measurement, and by the spatial phase-shift ESPI system, which is particularly useful for dynamic measurement, are discussed. For each method, the basic theory, a brief derivation and different optical layouts are presented. The state of art application, potential and limitation of the ESPI systems are shown and demonstrated. 展开更多
关键词 electronic speckle pattern interferometry（ESPI） three dimensional displacement and strain measurement static loading,dynamic loading phase-shift technology
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Phase-Based Optical Flow Method with Optimized Parameter Settings for Enhancing Displacement Measurement Adaptability 认领 引用
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作者 Zhaoxin Peng Menglian Liu +2 位作者 Zhiliang Wang Wei Liu Xian Wang 《Open Journal of Applied Sciences》 2024年第5期1165-1184,共20页
To enhance the applicability and measurement accuracy of phase-based optical flow method using complex steerable pyramids in structural displacement measurement engineering applications, an improved method of optimizi... To enhance the applicability and measurement accuracy of phase-based optical flow method using complex steerable pyramids in structural displacement measurement engineering applications, an improved method of optimizing parameter settings is proposed. The optimized parameters include the best measurement points of the Region of Interest (ROI) and the levels of pyramid filters. Additionally, to address the issue of updating reference frames in practical applications due to the difficulty in estimating the maximum effective measurement value, a mechanism for dynamically updating reference frames is introduced. Experimental results demonstrate that compared to representative image gradient-based displacement measurement methods, the proposed method exhibits higher measurement accuracy in engineering applications. This provides reliable data support for structural damage identification research based on vibration signals and is expected to broaden the engineering application prospects for structural health monitoring. 展开更多
关键词 Displacement Measurement Phase-Based Optical Flow Optimized Parameter Setting
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Homodyne Littrow grating interferometer for two-degrees-of-freedom measurement 认领 引用
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作者 QIAN Xin-ge LIANG Xu +4 位作者 LIU Zhao-wu GAO Xu JIN Si-yu ZHANG Yao-yu LI Wen-hao 《中国光学（中英文）》 EI CAS CSCD 北大核心 2026年第3期689-700,共12页
In response to the current demand for high-precision planar displacement measurements in ad-vanced manufacturing equipment,this paper proposes an xz dual-axis grating interferometer.The system ad-opts a biaxial Littro... In response to the current demand for high-precision planar displacement measurements in ad-vanced manufacturing equipment,this paper proposes an xz dual-axis grating interferometer.The system ad-opts a biaxial Littrow incident light path structure,established using a biaxial beam splitter mirror and right-angled prism mirror.The relationship between the parallelism of the outgoing beam,the beam spacing,and the position and angle of the incident light is analyzed.Experimental results verify the feasibility and meas-urement performance of the proposed interferometer.The grating interferometer achieves a displacement res-olution of 4 nm along the x-axis and 7 nm along the z-axis.After correction using the Heydemann algorithm,the periodic nonlinear error is reduced to±5 nm.Over a travel range of 10 mm,the measurement accuracies are±30 nm along the x-axis and±100 nm along the z-axis,respectively.Finally,the influence of the surface error introduced by the non-coincident incident structure on the measurement results is discussed. 展开更多
关键词 grating interferometer two-degree-of-freedom displacement measurement Littrow structure surface shape error
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Nanometer-scale displacement measurement based on an orthogonal dual Michelson interferometer 认领 引用 被引量：2
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作者 王菊 蔡滋恒 +2 位作者 于晋龙 罗浩 马闯 《Chinese Optics Letters》 SCIE EI CAS CSCD 2023年第10期30-35,共6页
In this Letter,we propose a simple structure of an orthogonal type double Michelson interferometer.The orthogonal detection method overcomes the problems of uneven ranging sensitivity and the inability of traditional ... In this Letter,we propose a simple structure of an orthogonal type double Michelson interferometer.The orthogonal detection method overcomes the problems of uneven ranging sensitivity and the inability of traditional interferometers to determine the displacement direction.The displacement measurement principle and signal processing method of the orthogonal double interferometer are studied.Unlike the arctangent algorithm,the displacement analysis uses the arc cosine algorithm,avoiding any pole limit in the distance analysis process.The minimum step size of the final experimental displacement system is 5 nm,which exhibits good repeatability,and the average error is less than 0.12 nm. 展开更多
关键词 orthogonal detection nanoscale displacement measurement laser interferometer
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A new method for angular displacement measurement 认领 引用 被引量：3
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作者 张彩妮 王向朝 《Chinese Optics Letters》 EI CAS 2003年第8期459-461,共3页
We describe a new method for angular displacement measurements that is based on a Fabry-Perot interferometer. A measurement accuracy of 10-8 rad is obtained by use of the sinusoidal phase modulating interferometry. An... We describe a new method for angular displacement measurements that is based on a Fabry-Perot interferometer. A measurement accuracy of 10-8 rad is obtained by use of the sinusoidal phase modulating interferometry. Another Fabry-Perot interferometer is used to obtain the key initial angle of incidence. 展开更多
关键词 for in on by A new method for angular displacement measurement of
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A modified moire interferometer for three-dimensional displacement measurement 认领 引用 被引量：4
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作者 王卫宁 孙建海 《Chinese Optics Letters》 EI CAS 2004年第7期396-398,共3页
This paper presents a new optical interferometric system, MMI-T/G, composed of a modified four-beam moire interferometer and a Twyman/Green interferometer. The MMI-T/G system can measure three-dimensional displacement... This paper presents a new optical interferometric system, MMI-T/G, composed of a modified four-beam moire interferometer and a Twyman/Green interferometer. The MMI-T/G system can measure three-dimensional displacement fringe patterns with a single loading on the specimen, and the in-plane and out-of-plane displacement fields can be measured independently and defined clearly. The optical setup has the advantages of structural novelty, flexibility, and high fringe contrast. Moreover, the in-plane displacement sensitivity is twice of that of the normal moire interferometer. The measuring techniques to obtain the fringe patterns and displacement fields using the MMI-T/G system are described. The experimental results of thermal displacement of an electronic device are shown. 展开更多
关键词 A modified moire interferometer for three-dimensional displacement measurement
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Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer 认领 引用
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作者 Ming Zhang Chang Ni +3 位作者 Yu Zhu Leijie Wang Chuxiong Hu Jinchun Hu 《Chinese Optics Letters》 SCIE EI CAS CSCD 2017年第10期56-60,共5页
A signal processing method of realizing a large-range displacement measurement in a sinusoidal phase- modulating laser diode interferometer is proposed. The method of obtaining the dynamic value of the effective sinus... A signal processing method of realizing a large-range displacement measurement in a sinusoidal phase- modulating laser diode interferometer is proposed. The method of obtaining the dynamic value of the effective sinusoidal phase-modulating depth is detailed, and the residual amplitude modulation is also taken into account. Numerical simulations and experiments are carried out to compare this method with the traditional one. We prove that, with this method, the sinusoidal phase-modulating laser diode interferometer can realize a centimeter-level displacement measurement range with high precision, which is much better than the traditional method. 展开更多
关键词 Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer
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Vertical Displacement Measurement in a Slow-Moving Sinkhole Using BOTDA 认领 引用 被引量：1
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作者 Pascual SEVILLANO Javier PRECIADO-GARBAYO +4 位作者 Jorge SEVIL Francisco GUTIERREZ Juan JMARTiNEZ Sonia MARTiN-LOPEZ Miguel GONZALEZ-HERRAEZ 《Photonic Sensors》 SCIE EI CSCD 2024年第1期23-39,共17页
The effectiveness of monitoring and early-warning systems for ground deformation phenomena,such as sinkholes,depends on their ability to accurately resolve the ongoing ground displacement and detect the subtle deforma... The effectiveness of monitoring and early-warning systems for ground deformation phenomena,such as sinkholes,depends on their ability to accurately resolve the ongoing ground displacement and detect the subtle deformation preceding catastrophic failures.Sagging sinkholes with a slow subsidence rate and diffuse edges pose a significant challenge for subsidence monitoring due to the low deformation rates and limited lateral strain gradients.In this work,we satisfactorily illustrate the practicality of the Brillouin optical time domain analysis(BOTDA)to measure the spatial-temporal patterns of the vertical displacement in such challenging slow-moving sagging sinkholes.To assess the performance of the approach,we compare the strain recorded by the distributed optical fiber sensor with the vertical displacement measured by high-precision leveling.The results show a good spatial correlation with the ability to identify the maximum subsidence point.There is also a good temporal correlation with the detection of an acceleration phase in the subsidence associated with a flood event. 展开更多
关键词 Distributed fiber optic sensing(DFOS) vertical displacement measurement slow subsidence rate sinkhole hazard early-warning system
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Ultra-high speed holographic shape and displacement measurements in the hearing sciences 认领 引用 被引量：2
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作者 Haimi Tang Pavel Psota +2 位作者 John J.Rosowski Cosme Furlong Jeffrey Tao Cheng 《Light: Advanced Manufacturing》 2022年第2期1-14,共14页
The auditory system of mammals enables the perception of sound from our surrounding world.Containing some of the smallest bones in the body,the ear transduces complex acoustic signals with high-temporal sensitivity to... The auditory system of mammals enables the perception of sound from our surrounding world.Containing some of the smallest bones in the body,the ear transduces complex acoustic signals with high-temporal sensitivity to complex mechanical vibrations with magnitudes as small as tens of picometers.Measurements of the shape and acoustically induced motions of different components of the ear are essential if we are to expand our understanding of hearing mechanisms,and also provide quantitative information for the development of numerical ear models that can be used to improve hearing protection,clinical diagnosis,and repair of damaged or diseased ears.We are developing digital holographic methods and instrumentation using an ultra-high speed camera to measure shape and acoustically-induced motions in the middle ear.Specifically we study the eardrum,the first structure of the middle ear which initializes the acoustic-mechanical transduction of sound for hearing.Our measurement system is capable of performing holographic measurement at rates up to 2.1 M frames per second.Two shape measurement modalities had previously been implemented into our holographic systems:(1)a multi-wavelength method with a wavelength tunable laser;and(2)a multi-angle illumination method with a single wavelength laser.In this paper,we present a third method using a miniaturized fringe projection system with a microelectromechanical system(MEMS)mirror.Further,we optimize the processing of large data sets of holographic displacement measurements using a vectorized Pearson's correlation algorithm.We validate and compare the shape and displacement measurements of our methodologies using a National Institute of Standards and Technology(NIST)traceable gauge and sound-activated latex membranes and human eardrums. 展开更多
关键词 Ultra-high speed digital holography Microelectromechanical systems(MEMS) Miniaturized Fringe Projection Middle-ear mechanics Shape and displacement measurements.
A planar capacitive sensor for 2D long-range displacement measurement 认领 引用 被引量：4
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作者 Jian-ping YU Wen WANG +2 位作者 Ke-qing LU De-qing MEI Zi-chen CHEN 《Journal of Zhejiang University-Science C(Computers and Electronics)》 2013年第4期252-257,共6页
A planar capacitive sensor(PCS) capable of 2D large-scale measurement is presented in this paper.Displacement interpretation depends on independently measuring the periodic variation in capacitance caused by the chang... A planar capacitive sensor(PCS) capable of 2D large-scale measurement is presented in this paper.Displacement interpretation depends on independently measuring the periodic variation in capacitance caused by the change in the overlapping area of sensing electrodes on a moving plate and a fixed plate.By accumulating the number of quarters in each direction and the specific position in the final quarter,the large-scale measurement is fulfilled.Displacements in Xand Y-direction can be measured independently and simultaneously.Simulation shows that a shorter gap distance and a longer electrode guarantee better sensitivity.Experiments based on a PCS test bench demonstrate that the PCS has a sensitivity of 0.198 mV/μm and a resolution of 0.308 μm.An electric fringe effect and other possible measurement errors on displacement interpretation accuracy are discussed.The study confirms the high potential of PCSs as innovative 2D long-range displacement sensors. 展开更多
关键词 Planar capacitive sensor （PCS） Displacement measurement 2D large-scale measurement
Improved calibration method for displacement transformation coefficient in optical and visual measurements 认领 引用
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作者 Haopeng Li Zurong Qiu 《Nanotechnology and Precision Engineering》 EI CAS CSCD 2023年第1期12-25,共14页
Optical and visual measurement technology is used widely in fields that involve geometric measurements,and among such technology are laser and vision-based displacement measuring modules(LVDMMs).The displacement trans... Optical and visual measurement technology is used widely in fields that involve geometric measurements,and among such technology are laser and vision-based displacement measuring modules(LVDMMs).The displacement transformation coefficient(DTC)of an LVDMM changes with the coordinates in the camera image coordinate system during the displacement measuring process,and these changes affect the displacement measurement accuracy of LVDMMs in the full field of view(FFOV).To give LVDMMs higher accuracy in the FFOV and make them adaptable to widely varying measurement demands,a new calibration method is proposed to improve the displacement measurement accuracy of LVDMMs in the FFOV.First,an image coordinate system,a pixel measurement coordinate system,and a displacement measurement coordinate system are established on the laser receiving screen of the LVDMM.In addition,marker spots in the FFOV are selected,and the DTCs at the marker spots are obtained from calibration experiments.Also,a fitting method based on locally weighted scatterplot smoothing(LOWESS)is selected,and with this fitting method the distribution functions of the DTCs in the FFOV are obtained based on the DTCs at the marker spots.Finally,the calibrated distribution functions of the DTCs are applied to the LVDMM,and experiments conducted to verify the displacement measurement accuracies are reported.The results show that the FFOV measurement accuracies for horizontal and vertical displacements are better than±15μm and±19μm,respectively,and that for oblique displacement is better than±24μm.Compared with the traditional calibration method,the displacement measurement error in the FFOV is now 90%smaller.This research on an improved calibration method has certain significance for improving the measurement accuracy of LVDMMs in the FFOV,and it provides a new method and idea for other vision-based fields in which camera parameters must be calibrated. 展开更多
关键词 Displacement transformation coefficient(DTC) Laser and vision-based displacement measuring module(LVDMM) Displacement measurement Locally weighted scatterplot smoothing(LOWESS) Calibration method
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3D Microdisplacement Monitoring of Large Aircraft Assembly with Automated In Situ Calibration 认领 引用 被引量：3
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作者 Zhenyuan Jia Bing Liang +2 位作者 Wei Liu Kun Liu Jianwei Ma 《Engineering》 SCIE EI CAS CSCD 2022年第12期105-116,共12页
Three-dimensional(3D)microdisplacement monitoring plays a crucial role in the assembly of large aircraft.This paper presents a broadly applicable high-precision online 3D microdisplacement monitoring method and system... Three-dimensional(3D)microdisplacement monitoring plays a crucial role in the assembly of large aircraft.This paper presents a broadly applicable high-precision online 3D microdisplacement monitoring method and system based on proximity sensors as well as a corresponding in situ calibration method,which can be applied under various extreme working conditions encountered in the aircraft assembly process,such as compact and obstructed spaces.A 3D monitoring model is first established to achieve 3D microdisplacement monitoring based only on the one-dimensional distances measured by proximity sensors,which concerns the extrinsic sensor parameters,such as the probe base point(PBP)and the unit displacement vector(UDV).Then,a calibration method is employed to obtain these extrinsic parameters with high precision by combining spatial transformation principles and weighted optimization.Finally,calibration and monitoring experiments performed for a tailplane assembly process are reported.The calibration precision for the PBP is better than±10 lm in the X and Y directions and±2 lm in the Z direction,and the calibration precision for the UDV is better than 0.07°.Moreover,the accuracy of the 3D microdisplacement monitoring system can reach±15 lm.In general,this paper provides new insights into the modeling and calibration of 3D microdisplacement monitoring based on proximity sensors and a precise,efficient,and low-cost technical means for performing related measurements in compact spaces during the aircraft assembly process. 展开更多
关键词 Aircraft manufacture Assembly Calibration Condition monitoring Displacement measurement
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Study and application of monitoring plane displacement of a similarity model based on time-series images 认领 引用 被引量：5
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作者 Xu Jiankun Wang Enyuan +1 位作者 Li Zhonghui Wang Chao 《Mining Science and Technology》 2011年第4期501-505,共5页
In order to compensate for the deficiency of present methods of monitoring plane displacement in similarity model tests,such as inadequate real-time monitoring and more manual intervention,an effective monitoring meth... In order to compensate for the deficiency of present methods of monitoring plane displacement in similarity model tests,such as inadequate real-time monitoring and more manual intervention,an effective monitoring method was proposed in this study,and the major steps of the monitoring method include:firstly,time-series images of the similarity model in the test were obtained by a camera,and secondly,measuring points marked as artificial targets were automatically tracked and recognized from time-series images.Finally,the real-time plane displacement field was calculated by the fixed magnification between objects and images under the specific conditions.And then the application device of the method was designed and tested.At the same time,a sub-pixel location method and a distortion error model were used to improve the measuring accuracy.The results indicate that this method may record the entire test,especially the detailed non-uniform deformation and sudden deformation.Compared with traditional methods this method has a number of advantages,such as greater measurement accuracy and reliability,less manual intervention,higher automation,strong practical properties,much more measurement information and so on. 展开更多
关键词 Plane displacement monitoring Similarity model test Time-series images Displacement measurement
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Stable bidirectional NPRO dual-frequency laser for a self-referenced heterodyne interferometer 认领 引用
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作者 Xuezhen Gong Wenxun Li +6 位作者 Rong Zhu Danqing Liu Weitong Fan Chunzhao Ma Jie Xu Hsien-Chi Yeh Changlei Guo 《Chinese Optics Letters》 SCIE EI CAS CSCD 2026年第7期137-144,共8页
In this work,we demonstrate the generation of a dual-frequency laser directly from a monolithic non-planar ring oscillator(NPRO)operating bidirectionally.A theoretical model of the bidirectional NPRO is established,an... In this work,we demonstrate the generation of a dual-frequency laser directly from a monolithic non-planar ring oscillator(NPRO)operating bidirectionally.A theoretical model of the bidirectional NPRO is established,and nonlinear error induced by frequency mixing is analyzed.The integrated source delivers a stable dual-frequency output with a total power exceeding 60 m W,and a frequency difference stabilized at 257.2 kHz with a standard deviation of less than 40 m Hz.To showcase its interferometric applicability,a heterodyne interferometer was constructed.Displacement measurements performed with this system have achieved a detection limit of 3 nm and have shown good linearity over a range of 30μm.Vibration measurements on a piezoelectric mirror have reached a detection limit below 1 pm and a linear range above8 nm.Owing to its high power,excellent frequency stability,and compact structure,this dual-frequency laser shows strong potential for precision interferometry. 展开更多
关键词 dual-frequency heterodyne interferometer displacement measurement
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A videogrammetric technique for measuring the vibration displacement of stay cables 认领 引用 被引量：2
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作者 ZHOU Xiaoqing XIA Yong +1 位作者 WEI Zelong WU Qingxiong 《Geo-Spatial Information Science》 EI 2012年第2期135-141,共7页
Stay cables in cable-stayed bridges are prone to large amplitude oscillations under external excitations.The vibration of the cables is predominantly measured by using accelerometers to measure the acceleration.The dy... Stay cables in cable-stayed bridges are prone to large amplitude oscillations under external excitations.The vibration of the cables is predominantly measured by using accelerometers to measure the acceleration.The dynamic displacement is then usually obtained indirectly from the double integration of the acceleration data.This paper reports an experimental method of measuring the displacement of stayed cables using a digital video camera.With the newly developed videogrammetric technique,the video clips are transferred into image frames,from which the shape and location of the target are identified.The displacement time history is then captured.The technique is applied to a cable-stayed bridge to measure the dynamic displacement of stay cables.The displacement is compared with the acceleration data in the frequency and time domains.The results show that the displacement measured by the digital video camera is comparable to the counterparts integrated from the acceleration data.The vibration frequencies identified from the acceleration are finally used to estimate the tension forces of the cables.The results show that the tension forces have insignificant changes after one year’s operation. 展开更多
关键词 stay cable vibration displacement measurement videogrammetric technique tension force
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Sampling Moiré method for full-field deformation measurement: A brief review 认领 引用 被引量：4
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作者 Qinghua Wang Shien Ri 《Theoretical & Applied Mechanics Letters》 CAS CSCD 2022年第1期42-48,共7页
The sampling Moiré(SM) method is one of the vision-based non-contact deformation measurement methods, which is a powerful tool for structural health monitoring and elucidation of damage mechanisms of materials. I... The sampling Moiré(SM) method is one of the vision-based non-contact deformation measurement methods, which is a powerful tool for structural health monitoring and elucidation of damage mechanisms of materials. In this review, the basic principle of the SM method for measuring the twodimensional displacement and strain distributions is introduced. When the grid is not a standard orthogonal grating and cracks exist on the specimen surface, the measurement methods are also stated. Two of the most typical application examples are described in detail. One is the dynamic deflection measurement of a large-scale concrete bridge, and the other is the residual thermal strain measurement of small-scale flip chip packages. Several further development points of this method are pointed out. The SM method is expected to be used for deformation measurement of various structures and materials for residual stress evaluation, crack location prediction, and crack growth evaluation on broad scales. 展开更多
关键词 Displacement measurement Strain distribution Bridge Flip chip package
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Sinusoidal Phase-Modulating Fabry-Perot Interferometer for Angular Displacement Measurement 认领 引用 被引量：1
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作者 Caini Zhang, Xiangzhao Wang Shanghai Institute of Optics and Fine Mechanics, CAS, P. R. China, Tel: 86-21-59911191, Fax: 86-21-59532831 《光学学报》 EI CAS 北大核心 2003年第S1期821-822,共2页
In this paper, a sinusoidal phase-modulating Fabry-Perot interferometer is proposed to measure angular displacement. The usefulness of the interferometer is demonstrated by simulations and experiments.
关键词 for is in In Sinusoidal Phase-Modulating Fabry-Perot Interferometer for Angular Displacement Measurement of that high
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New multiplexed system for synchronous measurement of out-of-plane deformation and two orthogonal slopes 认领 引用
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作者 Yonghong Wang Xiao Zhang +3 位作者 Qihan Zhao Yanfeng Yao Peizheng Yan Biao Wang 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第3期259-264,共6页
We propose a novel system for synchronous measurement of out-of-plane deformation and two orthogonal slopes using a single camera. The linearly polarized reference beam introduced by an optical fiber interferes with t... We propose a novel system for synchronous measurement of out-of-plane deformation and two orthogonal slopes using a single camera. The linearly polarized reference beam introduced by an optical fiber interferes with the unpolarized object beam to measure the out-of-plane deformation. A modified Mach–Zehnder interferometer is used to measure the two orthogonal slopes of the out-of-plane deformation. One of the object beams of the Mach–Zehnder interferometer is an unpolarized beam, and the other object beam is split into two orthogonal linearly polarized object beams by a polarizing prism. The two beams are orthogonally polarized. Hence, they will not interfere with each other. The two polarized beams respectively interfere with the unpolarized beam to simultaneously measure the two orthogonal slopes of the out-of-plane deformation. In addition, the imaging lens and apertures are respectively placed in three optical paths to independently control the carrier frequencies and shearing amounts. The effectiveness of this method can be proved by measuring two pressure-loaded circular plates. 展开更多
关键词 digital speckle pattern interferometry digital shearography simultaneous measurement of displacement and two orthogonal slopes
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