High ultraviolet(UV)stability and low dark current(Idark)are necessary for high-quality perovskite photodetectors(PDs).TiO2thin film is known as effective electron-transport-layer(ETL)for perovskite devices.However...High ultraviolet(UV)stability and low dark current(Idark)are necessary for high-quality perovskite photodetectors(PDs).TiO2thin film is known as effective electron-transport-layer(ETL)for perovskite devices.However,common spin-coated TiO2ETLs endow many surface defects and have strong UV photocatalytic effect to decompose perovskite materials,resulting in inferior stability of devices.In this work,TiO2bilayer film(Bi-TiO2)has been fabricated by combining spin-coating and atomic-layer-deposition process and its positive effects on UV stability and Idarkof Cs2 AgBiBr6-based PDs have been revealed for the first time.It is demonstrated that Bi-TiO2possesses fewer surface defects and smoother morphology with type II band alignment,which is beneficial to suppress photocatalytic activity of TiO2and reduce carrier recombination at the interface.After accelerated strong UV aging treatment,the PD with Bi-TiO2maintains excellent performance,whereas the PD with spin-coated TiO2film dramatically deteriorate with on-off ratio drops from~102 to~2.Besides,the Idarkof PD remarkably decreases from~10-8 A to~10-10 A after bilayer optimization.Furthermore,we have integrated the corresponding PDs into a self-built imaging system adopting diffuse reflection mode.This work suggests a feasible approach to fabricate TiO2/Cs2 AgBiBr6-based PDs with remarkable UV tolerance for imaging applications.展开更多
Total dose effects and single event effects on radiation-hardened power vertical double-diffusion metal oxide semiconductor(VDMOS) devices with composite SiO2-Si3N4 film gates are investigated.The relationships amon...Total dose effects and single event effects on radiation-hardened power vertical double-diffusion metal oxide semiconductor(VDMOS) devices with composite SiO2-Si3N4 film gates are investigated.The relationships among the important electrical parameters of the samples with different thickness SiO2-Si3N4 films,such as threshold voltage,breakdown voltage,and on-state resistance in accumulated dose,are discussed.The total dose experiment results show that the breakdown voltage and the on-state resistance barely change with the accumulated dose.However,the relationships between the threshold voltages of the samples and the accumulated dose are more complex,and not only positively drift,but also negatively drift.At the end of the total dose experiment,we select the group of samples which have the smaller threshold voltage shift to carry out the single event effect studies.We find that the samples with appropriate thickness ratio SiO2-Si3N4 films have a good radiation-hardening ability.This method may be useful in solving both the SEGR and the total dose problems with the composite SiO2-Si3N4 films.展开更多
[SiO2/FePt]5/Ag thin films were deposited by RF magnetron sputtering on the glass substrates and post annealing at 550 ℃ for 30 min in vacuum. Vibrating sample magnetometer and X-ray diffraction analyser were applied...[SiO2/FePt]5/Ag thin films were deposited by RF magnetron sputtering on the glass substrates and post annealing at 550 ℃ for 30 min in vacuum. Vibrating sample magnetometer and X-ray diffraction analyser were applied to study the magnetic properties and microstructures of the films. The results show that without Ag underlayer [SiO2/FePt]5 films deposited onto the glass are FCC disordered; with the addition of Ag underlayer [SiO]FePt]5/Ag films are changed into L10 and (111) mixed texture. The variation of the SiO2 nonmagnetic layer thickness in [SiO2/FePt]5/Ag films indicates that SiO2-doping plays an important role in improving the order parameter and the perpendicular magnetic anisotropy, and reducing the grain size and intergrain interactions. By controlling SiO2 thickness the highly perpendicular magnetic anisotropy can be obtained in the [SiO2 (0.6 nm)/FePt (3 nm)]5/Ag (50 nm) films and highly (001)-oriented films can be obtained in the [SiO2 (2 nm)/FePt (3 nm)]5/Ag (50 nm) films.展开更多
After compositing with SiO_2 layers, it is shown that superlattice-like Sb/SiO_2 thin films have higher crystallization temperature(~240°C), larger crystallization activation energy(6.22 e V), and better data...After compositing with SiO_2 layers, it is shown that superlattice-like Sb/SiO_2 thin films have higher crystallization temperature(~240°C), larger crystallization activation energy(6.22 e V), and better data retention ability(189°C for 10 y). The crystallization of Sb in superlattice-like Sb/SiO_2 thin films is restrained by the multilayer interfaces. The reversible resistance transition can be achieved by an electric pulse as short as 8 ns for the Sb(3 nm)/SiO_2(7 nm)-based phase change memory cell. A lower operation power consumption of 0.09 m W and a good endurance of 3.0 × 10~6 cycles are achieved. In addition, the superlattice-like Sb(3 nm)/SiO_2(7 nm) thin film shows a low thermal conductivity of 0.13 W/(m·K).展开更多
Nano metal-particle dispersed glasses are the attractive candidates for nonlinear optical material applications. Au/SiO2 nano-composite thin films with 3 vol% to 65 vol% Au are prepared by inductively coupled plasma s...Nano metal-particle dispersed glasses are the attractive candidates for nonlinear optical material applications. Au/SiO2 nano-composite thin films with 3 vol% to 65 vol% Au are prepared by inductively coupled plasma sputtering. Au particles as perfect spheres with diameters between 10 nm and 30 nm are uniformly dispersed in the SiO2 matrix. Optical absorption peaks due to the surface plasmon resonance of Au particles are observed. The absorption property is enhanced with the increase of Au content, showing a maximum value in the films with 37 vol% Au. The absorption curves of the Au/SiO2 thin films with 3 vol% to 37 vol% Au accord well with the theoretical optical absorption spectra obtained from Mie resonance theory. Increasing Au content over 37 vol% results in the partial connection of Au particles, whereby the intensity of the absorption peak is weakened and ultimately replaced by the optical absorption of the bulk. The band gap decreases with Au content increasing from 3 vol% to 37 vol % but increases as Au content further increases.展开更多
By means of scanning electron microscope(SEM)and high voltage electron microscope(HVEM)we have observed and analysed morphology and micro-structure of silicon oxide film with different thickness formed on(111)silicon ...By means of scanning electron microscope(SEM)and high voltage electron microscope(HVEM)we have observed and analysed morphology and micro-structure of silicon oxide film with different thickness formed on(111)silicon monocrystal under dry oxygen atmosphere at 1100℃.Compared with their oxidation kinetic curves consisted of three stages,we suggested a mechanism on forming silicon oxide film.According to electron and X-ray diffraction analyses the silicon oxide films consisted of silica with different crystal structure.We also have discussed a stacking fault and a dislocation formed in the Si-Sio_2 interface region simulaneously forming silicon oxide film.展开更多
Microwave electron cyclotron resonance plasma enhanced chemical vapor depositionwas used to grow silicon dioxide films on crystalline silicon substrate for planar optical waveguides.The relationship between plasma par...Microwave electron cyclotron resonance plasma enhanced chemical vapor depositionwas used to grow silicon dioxide films on crystalline silicon substrate for planar optical waveguides.The relationship between plasma parameters and deposition rates was investigated, and the influ-ence of radio frequency substrate bias on properties of SiO2 films was also preliminarily studied.X-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy, scanning electron mi-croscopy, atomic force microscopy and elllipsometry were used to characterize the deposited films,showing that SiO2 films with good structural and optical properties prepared at low temperaturehave been achieved. They can basically meet the requirements of integrated optical waveguides.展开更多
Slag movement on SiO2-based prism refractories in different slag systems was observed. The cross section shape evolution mechanism was discussed. Two types of shape evolution appear. For PbO-SiO2 slag whose surface te...Slag movement on SiO2-based prism refractories in different slag systems was observed. The cross section shape evolution mechanism was discussed. Two types of shape evolution appear. For PbO-SiO2 slag whose surface tension improves with SiO2 concentration, slag film flows up along four edges under axial Marangoni shear force and wettability. Then, it flows down along four lateral faces under gravity. Corrosion rate at edges is larger than that on lateral faces due to different SiO2 solubilities of ascending and descending flow. Prism cross section shape changes from square to round. For FetO-SiO2 slag whose surface tension reduces with the increase of SiO2 concentration, slag film flows up under the inflence of wettability. Then, it flows down under Marangoni shear force and gravity. Compared to four edges, slag is mainly up and down on four lateral faces due to larger surface tension and size. So, prism cross section shape keeps square.展开更多
The uniform transparent TiO2/SiO2 photocatalytic composite thin films are prepared by sol-gel method on the soda lime glass substrates, and characterized by UV-visible spectroscopy, X-ray diffraction (XRD), transmissi...The uniform transparent TiO2/SiO2 photocatalytic composite thin films are prepared by sol-gel method on the soda lime glass substrates, and characterized by UV-visible spectroscopy, X-ray diffraction (XRD), transmission electron microscopy (TEM), BET surface area, FTIR spectroscopy and X-ray photoelectron spectroscopy (XPS). It was found that the addition of SiO2 to TiO2 thin films can suppress the grain growth of TiO2 crystal, increase the hydroxyl content on the surface of TiO2 films, lower the contact angle for water on TiO, films and enhance the hydrophilic property of TiO2 films. The super-hydrophilic TiO2/SiO2 photocatalytic composite thin films with the contact angle of 0((o) under bar) are obtained by the addition of 10%-20% SiO2 in mole fraction.展开更多
基金financial supports from National Natural Science Foundation of China(51772135)the Ministry of Education of China(6141A02022516)+4 种基金the Fundamental Research Funds for the Central Universities(11619103)the China Postdoctoral Science Foundation(2019M663376)the Natural Science Foundation of Guangdong Province,China(Grant Nos.2017A020215135 and2018A030310659)Guangdong Basic and Applied Basic Research Foundation(2020A1515011377)the Science and Technology Program of Guangzhou,China(Grant No.201804010432)。
摘要High ultraviolet(UV)stability and low dark current(Idark)are necessary for high-quality perovskite photodetectors(PDs).TiO2thin film is known as effective electron-transport-layer(ETL)for perovskite devices.However,common spin-coated TiO2ETLs endow many surface defects and have strong UV photocatalytic effect to decompose perovskite materials,resulting in inferior stability of devices.In this work,TiO2bilayer film(Bi-TiO2)has been fabricated by combining spin-coating and atomic-layer-deposition process and its positive effects on UV stability and Idarkof Cs2 AgBiBr6-based PDs have been revealed for the first time.It is demonstrated that Bi-TiO2possesses fewer surface defects and smoother morphology with type II band alignment,which is beneficial to suppress photocatalytic activity of TiO2and reduce carrier recombination at the interface.After accelerated strong UV aging treatment,the PD with Bi-TiO2maintains excellent performance,whereas the PD with spin-coated TiO2film dramatically deteriorate with on-off ratio drops from~102 to~2.Besides,the Idarkof PD remarkably decreases from~10-8 A to~10-10 A after bilayer optimization.Furthermore,we have integrated the corresponding PDs into a self-built imaging system adopting diffuse reflection mode.This work suggests a feasible approach to fabricate TiO2/Cs2 AgBiBr6-based PDs with remarkable UV tolerance for imaging applications.
摘要Total dose effects and single event effects on radiation-hardened power vertical double-diffusion metal oxide semiconductor(VDMOS) devices with composite SiO2-Si3N4 film gates are investigated.The relationships among the important electrical parameters of the samples with different thickness SiO2-Si3N4 films,such as threshold voltage,breakdown voltage,and on-state resistance in accumulated dose,are discussed.The total dose experiment results show that the breakdown voltage and the on-state resistance barely change with the accumulated dose.However,the relationships between the threshold voltages of the samples and the accumulated dose are more complex,and not only positively drift,but also negatively drift.At the end of the total dose experiment,we select the group of samples which have the smaller threshold voltage shift to carry out the single event effect studies.We find that the samples with appropriate thickness ratio SiO2-Si3N4 films have a good radiation-hardening ability.This method may be useful in solving both the SEGR and the total dose problems with the composite SiO2-Si3N4 films.
基金Project(10574085) supported by the National Natural Science Foundation of ChinaProject(207020) supported by the Science Technology Key Project of the Ministry of Education, China
摘要[SiO2/FePt]5/Ag thin films were deposited by RF magnetron sputtering on the glass substrates and post annealing at 550 ℃ for 30 min in vacuum. Vibrating sample magnetometer and X-ray diffraction analyser were applied to study the magnetic properties and microstructures of the films. The results show that without Ag underlayer [SiO2/FePt]5 films deposited onto the glass are FCC disordered; with the addition of Ag underlayer [SiO]FePt]5/Ag films are changed into L10 and (111) mixed texture. The variation of the SiO2 nonmagnetic layer thickness in [SiO2/FePt]5/Ag films indicates that SiO2-doping plays an important role in improving the order parameter and the perpendicular magnetic anisotropy, and reducing the grain size and intergrain interactions. By controlling SiO2 thickness the highly perpendicular magnetic anisotropy can be obtained in the [SiO2 (0.6 nm)/FePt (3 nm)]5/Ag (50 nm) films and highly (001)-oriented films can be obtained in the [SiO2 (2 nm)/FePt (3 nm)]5/Ag (50 nm) films.
基金Supported by the National Natural Science Foundation of China under Grant No 11774438the Natural Science Foundation of Jiangsu Province under Grant No BK20151172+2 种基金the Changzhou Science and Technology Bureau under Grant No CJ20160028the Qing Lan Project,the Opening Project of State Key Laboratory of Silicon Materials under Grant No SKL2017-04the Opening Project of Key Laboratory of Microelectronic Devices and Integrated Technology of Institute of Microelectronics of Chinese Academy of Sciences
摘要After compositing with SiO_2 layers, it is shown that superlattice-like Sb/SiO_2 thin films have higher crystallization temperature(~240°C), larger crystallization activation energy(6.22 e V), and better data retention ability(189°C for 10 y). The crystallization of Sb in superlattice-like Sb/SiO_2 thin films is restrained by the multilayer interfaces. The reversible resistance transition can be achieved by an electric pulse as short as 8 ns for the Sb(3 nm)/SiO_2(7 nm)-based phase change memory cell. A lower operation power consumption of 0.09 m W and a good endurance of 3.0 × 10~6 cycles are achieved. In addition, the superlattice-like Sb(3 nm)/SiO_2(7 nm) thin film shows a low thermal conductivity of 0.13 W/(m·K).
基金Project supported by the National Natural Science Foundation of China (Grant Nos 50842028 and 50972012)the National Basic Research Program of China (Grant No 2007CB613301)
摘要Nano metal-particle dispersed glasses are the attractive candidates for nonlinear optical material applications. Au/SiO2 nano-composite thin films with 3 vol% to 65 vol% Au are prepared by inductively coupled plasma sputtering. Au particles as perfect spheres with diameters between 10 nm and 30 nm are uniformly dispersed in the SiO2 matrix. Optical absorption peaks due to the surface plasmon resonance of Au particles are observed. The absorption property is enhanced with the increase of Au content, showing a maximum value in the films with 37 vol% Au. The absorption curves of the Au/SiO2 thin films with 3 vol% to 37 vol% Au accord well with the theoretical optical absorption spectra obtained from Mie resonance theory. Increasing Au content over 37 vol% results in the partial connection of Au particles, whereby the intensity of the absorption peak is weakened and ultimately replaced by the optical absorption of the bulk. The band gap decreases with Au content increasing from 3 vol% to 37 vol % but increases as Au content further increases.
摘要By means of scanning electron microscope(SEM)and high voltage electron microscope(HVEM)we have observed and analysed morphology and micro-structure of silicon oxide film with different thickness formed on(111)silicon monocrystal under dry oxygen atmosphere at 1100℃.Compared with their oxidation kinetic curves consisted of three stages,we suggested a mechanism on forming silicon oxide film.According to electron and X-ray diffraction analyses the silicon oxide films consisted of silica with different crystal structure.We also have discussed a stacking fault and a dislocation formed in the Si-Sio_2 interface region simulaneously forming silicon oxide film.
摘要Microwave electron cyclotron resonance plasma enhanced chemical vapor depositionwas used to grow silicon dioxide films on crystalline silicon substrate for planar optical waveguides.The relationship between plasma parameters and deposition rates was investigated, and the influ-ence of radio frequency substrate bias on properties of SiO2 films was also preliminarily studied.X-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy, scanning electron mi-croscopy, atomic force microscopy and elllipsometry were used to characterize the deposited films,showing that SiO2 films with good structural and optical properties prepared at low temperaturehave been achieved. They can basically meet the requirements of integrated optical waveguides.
基金Projects(U1738101,51804023)supported by the National Natural Science Foundation of ChinaProjects(FRF-TP-18-007A1,FRF-MP-18-007)supported by Fundamental Research Funds for the Central Universities,ChinaProject(2019M650489)supported by China Postdoctoral Science Foundation
摘要Slag movement on SiO2-based prism refractories in different slag systems was observed. The cross section shape evolution mechanism was discussed. Two types of shape evolution appear. For PbO-SiO2 slag whose surface tension improves with SiO2 concentration, slag film flows up along four edges under axial Marangoni shear force and wettability. Then, it flows down along four lateral faces under gravity. Corrosion rate at edges is larger than that on lateral faces due to different SiO2 solubilities of ascending and descending flow. Prism cross section shape changes from square to round. For FetO-SiO2 slag whose surface tension reduces with the increase of SiO2 concentration, slag film flows up under the inflence of wettability. Then, it flows down under Marangoni shear force and gravity. Compared to four edges, slag is mainly up and down on four lateral faces due to larger surface tension and size. So, prism cross section shape keeps square.
基金This work was financially supported by the Foundation for University Key Teachers by the Ministry of Education, theKey Resear
摘要The uniform transparent TiO2/SiO2 photocatalytic composite thin films are prepared by sol-gel method on the soda lime glass substrates, and characterized by UV-visible spectroscopy, X-ray diffraction (XRD), transmission electron microscopy (TEM), BET surface area, FTIR spectroscopy and X-ray photoelectron spectroscopy (XPS). It was found that the addition of SiO2 to TiO2 thin films can suppress the grain growth of TiO2 crystal, increase the hydroxyl content on the surface of TiO2 films, lower the contact angle for water on TiO, films and enhance the hydrophilic property of TiO2 films. The super-hydrophilic TiO2/SiO2 photocatalytic composite thin films with the contact angle of 0((o) under bar) are obtained by the addition of 10%-20% SiO2 in mole fraction.