This paper presents a digital readout system to detect small capacitive signals of a micromachined angular rate sensor. The flexible parameter adjustment ability and the computation speed of the digital signal process...This paper presents a digital readout system to detect small capacitive signals of a micromachined angular rate sensor. The flexible parameter adjustment ability and the computation speed of the digital signal processor were used to develop a new calibration procedure to determine the scale factor of a gyroscope without a turntable. The force of gravity was used to deflect the movable masses in the sensor, which resulted in a corresponding angular rate input. The gyroscope scale factor was then measured without a turntable. Test results show a maximum deviation of about 1.2% with respect to the scale factor determined on a turntable with the accuracy independent of the manufacturing process and property variations The calibration method in combination with the improved readout electronics can minimize the calibration procedure and, thus, reduce the manufacturing costs.展开更多
In recent years,a large number of small volume,low cost micro electro mechanical systems(MEMS)digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these...In recent years,a large number of small volume,low cost micro electro mechanical systems(MEMS)digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these kinds of gyroscopes have poor performances in initial zero-bias,temperature drift,In-Run bias stability,bias repeatability,etc.,their output errors need to be compensated before being used.Based on a lot of experiments,the temperature drift and the initial zero-bias are the major error sources in the MEMS gyroscopes output data.Due to the poor repeatability of temperature drift,the temperature compensation coefficients need to be recalculated every time before using.In order to recalculate parameters of the temperature compensation model quickly,a 1st-order polynomial model of temperature is established,then a forgetting factor recursive least squares estimator will be adopted to identify the model parameters in real time.Static and dynamic experimental data shows that this method removed/compensated the temperature drift and initial zero-bias from the output of the gyroscopes effectively.展开更多
An equivalent circuit model of a novel fence structure vibratory micromachined gy- roscope's oscillating properties is modeled by electrical equivalent circuits according to its dynamics equation.Equivalent circui...An equivalent circuit model of a novel fence structure vibratory micromachined gy- roscope's oscillating properties is modeled by electrical equivalent circuits according to its dynamics equation.Equivalent circuit model of oscillating and differential detection capacitance model are im- plemented in the circuit simulation tool PSPICE,which is available in oscillating properties analysis such as oscillating's transient response,steady response and frequency response to angular rate to op- timize working mode of the gyroscope.The model also enables sensor simulation with the interfacing electronics to analyse the performances of the whole system.Behavioral simulation of the system is performed to prove the function of detection circuits.The simulation results and measurement results show that the design of circuits is feasible.展开更多
摘要This paper presents a digital readout system to detect small capacitive signals of a micromachined angular rate sensor. The flexible parameter adjustment ability and the computation speed of the digital signal processor were used to develop a new calibration procedure to determine the scale factor of a gyroscope without a turntable. The force of gravity was used to deflect the movable masses in the sensor, which resulted in a corresponding angular rate input. The gyroscope scale factor was then measured without a turntable. Test results show a maximum deviation of about 1.2% with respect to the scale factor determined on a turntable with the accuracy independent of the manufacturing process and property variations The calibration method in combination with the improved readout electronics can minimize the calibration procedure and, thus, reduce the manufacturing costs.
摘要In recent years,a large number of small volume,low cost micro electro mechanical systems(MEMS)digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these kinds of gyroscopes have poor performances in initial zero-bias,temperature drift,In-Run bias stability,bias repeatability,etc.,their output errors need to be compensated before being used.Based on a lot of experiments,the temperature drift and the initial zero-bias are the major error sources in the MEMS gyroscopes output data.Due to the poor repeatability of temperature drift,the temperature compensation coefficients need to be recalculated every time before using.In order to recalculate parameters of the temperature compensation model quickly,a 1st-order polynomial model of temperature is established,then a forgetting factor recursive least squares estimator will be adopted to identify the model parameters in real time.Static and dynamic experimental data shows that this method removed/compensated the temperature drift and initial zero-bias from the output of the gyroscopes effectively.
基金The project supported by the Major State Basic Research Development Program "Integrated Micro-Optical-Electro-Mechanical System"(G1999033101)
摘要An equivalent circuit model of a novel fence structure vibratory micromachined gy- roscope's oscillating properties is modeled by electrical equivalent circuits according to its dynamics equation.Equivalent circuit model of oscillating and differential detection capacitance model are im- plemented in the circuit simulation tool PSPICE,which is available in oscillating properties analysis such as oscillating's transient response,steady response and frequency response to angular rate to op- timize working mode of the gyroscope.The model also enables sensor simulation with the interfacing electronics to analyse the performances of the whole system.Behavioral simulation of the system is performed to prove the function of detection circuits.The simulation results and measurement results show that the design of circuits is feasible.