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Multi-beam scanning electron microscope(MBSEM):Technological evolution,core breakthroughs,and cross-field applications 认领 引用
1
作者 Wuyang Tan Mengni Liu +5 位作者 Ke Pei Chendi Yang Jiazhuan Qin Chao Wang Xuebing Zhao Renchao Che 《Chinese Physics B》 SCIE EI CAS CSCD 2026年第6期501-512,共12页
Multi-beam scanning electron microscope(MBSEM)reconciles the inherent contradiction between“resolution and throughput”of traditional scanning electron microscopes(SEMs)through parallel electron beam manipulation,eme... Multi-beam scanning electron microscope(MBSEM)reconciles the inherent contradiction between“resolution and throughput”of traditional scanning electron microscopes(SEMs)through parallel electron beam manipulation,emerging as a key technology to address the bottlenecks in large-volume,high-resolution imaging and advanced industrial inspection.This article provides a comprehensive overview of MBSEM,covering its evolutionary course of technology,core design fundamentals,and interdisciplinary applications.First,it sorts out the evolutionary process from conceptualization in the early 21 st century to commercialization in the 2010s,clarifying the core logic of breaking through the physical limitations of single-beam systems via“multi-beam parallelism”.Subsequently,focusing on the core technological chain of“beam generation–optical focusing–signal detection–data processing”,it conducts an in-depth analysis of the design concepts,technical characteristics,and applicable scenarios of three mainstream architectures:the single-source single-column,split optical system,and semiconductor-specific multi-beam inspection(MBI).Combined with representative research and product data from teams such as Delft University of Technology,Zeiss,and ASML/HMI,it reveals the differentiated advantages of each architecture in beam uniformity(the relative deviation percentage of the current density and probe size of each sub-beam in the multi-beam array from the central beam,with a smaller deviation value indicating better uniformity)and signal crosstalk(the percentage of the interference signal intensity to the target signal intensity when the detection signal of a single beam in the multi-beam array interferes with the detection channel of adjacent beams)control,and throughput(the percentage of the interference signal intensity to the target signal intensity when the detection signal of a single beam in the multi-beam array interferes with the detection channel of adjacent beams)improvement.Finally,integrating the practical demands of neuroscience connectomics,advanced semiconductor manufacturing processes,and biomedicine,it elaborates on the application breakthroughs of MBSEM in the three-dimensional(3D)reconstruction of large-volume brain tissue,wafer defect screening for 7 nm and smaller nodes,and low-damage imaging of thin biological tissues,and compares its disruptive value relative to traditional technologies(single-beam SEM,optical inspection).Unlike previous reviews,this work systematically integrates both academic prototypes and industrial systems for the first time,providing an in-depth analysis of the differentiated trade-offs among imaging speed,resolution,and sample adaptability across different architectures,offering a systematic reference for MBSEM R&D and interdisciplinary applications. 展开更多
关键词 multi-beam scanning electron microscopy(MBSEM) parallel imaging technology connectomics advanced semiconductor process inspection beam control and signal processing
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Reduction of distortion and improvement of efficiency for gridding of scattered gravity and magnetic data 认领 引用 被引量：2
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作者 张晨 姚长利 +3 位作者 谢永茂 郑元满 关胡良 洪东明 《Applied Geophysics》 SCIE CSCD 2012年第4期378-390,494,共13页
This paper presents a reasonable gridding-parameters extraction method for setting the optimal interpolation nodes in the gridding of scattered observed data. The method can extract optimized gridding parameters based... This paper presents a reasonable gridding-parameters extraction method for setting the optimal interpolation nodes in the gridding of scattered observed data. The method can extract optimized gridding parameters based on the distribution of features in raw data. Modeling analysis proves that distortion caused by gridding can be greatly reduced when using such parameters. We also present some improved technical measures that use human- machine interaction and multi-thread parallel technology to solve inadequacies in traditional gridding software. On the basis of these methods, we have developed software that can be used to grid scattered data using a graphic interface. Finally, a comparison of different gridding parameters on field magnetic data from Ji Lin Province, North China demonstrates the superiority of the proposed method in eliminating the distortions and enhancing gridding efficiency. 展开更多
关键词 Scattered data gridding parameters analysis of distribution features human-machine interaction multi-thread parallel technology
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Anti-D Chain:A Lightweight DDoS Attack Detection Scheme Based on Heterogeneous Ensemble Learning in Blockchain 认领 引用 被引量：14
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作者 Bin Jia Yongquan Liang 《China Communications》 SCIE CSCD 2020年第9期11-24,共14页
With rapid development of blockchain technology,blockchain and its security theory research and practical application have become crucial.At present,a new DDoS attack has arisen,and it is the DDoS attack in blockchain... With rapid development of blockchain technology,blockchain and its security theory research and practical application have become crucial.At present,a new DDoS attack has arisen,and it is the DDoS attack in blockchain network.The attack is harmful for blockchain technology and many application scenarios.However,the traditional and existing DDoS attack detection and defense means mainly come from the centralized tactics and solution.Aiming at the above problem,the paper proposes the virtual reality parallel anti-DDoS chain design philosophy and distributed anti-D Chain detection framework based on hybrid ensemble learning.Here,Ada Boost and Random Forest are used as our ensemble learning strategy,and some different lightweight classifiers are integrated into the same ensemble learning algorithm,such as CART and ID3.Our detection framework in blockchain scene has much stronger generalization performance,universality and complementarity to identify accurately the onslaught features for DDoS attack in P2P network.Extensive experimental results confirm that our distributed heterogeneous anti-D chain detection method has better performance in six important indicators(such as Precision,Recall,F-Score,True Positive Rate,False Positive Rate,and ROC curve). 展开更多
关键词 DDoS attack detection parallel blockchain technology ensemble learning Ada Boost random forest
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Three-dimensional Pore-network Cracks Transient Hydrofacturing-liquefaction in Tight Sandstone under Seismic Wave&Electromagneto-thermo-elastic Fields 认领 引用
4
作者 Yongbing Li Bojing Zhu 《地球科学期刊（中英文版）》 2014年第2期37-54,共18页
This contribution presents a new theory with lattice Boltzmann&finite element&hypersingular integral equation(LB-FE-HIE)to explore the three-dimensional pore-network cracks transient hydrofacturing-liquefactio... This contribution presents a new theory with lattice Boltzmann&finite element&hypersingular integral equation(LB-FE-HIE)to explore the three-dimensional pore-network cracks transient hydrofacturing-liquefaction in tight sandstone(3D PC-TH-TS)under seismic waves&electro-magneto-thermo-elastic fields through intricate theoretical analysis and numerical simulations First,the 3D PN-TH-TS problem is reduced to solving a set of coupled LB-FE-HIEs by using the Green functions and distribution functions,in which the unknown functions are the extended pore-network cracks displacement discontinuities.Then,the behavior of the extended displacement discontinuities at the pore-network cracks surface terminating at the solid-liquid film interface are analyzed through extended dynamic hypersingular integral main-part analysis method of LB-FE-HIEs.Closed formed solutions for the extended singular dynamic stress,the extended dynamic stress intensity factor and the extended dynamic energy release rate near the dislocations interface are provided.Last,the tight sandstone sample from the Ordos Basin Triassic formation is selected,the fluid-solid coupled digital rock physical modeling is established,and the simulations of 3D PC-TH-TS process is presented on the parallel CPU-GPU platform.The hydrofacturing-liquefaction varying with the amplitude,frequency and constituting time of earthquake wave is obtained.The relationship between the tight sandstone pore-network cracks transient propagation-evolution and the maximum tight sandstone fracturing-liquefaction stress criteria is explored. 展开更多
关键词 Hydrofracturing-liquefaction Tight Sandstone Lattice Boltzmann Method Finite Element Method Hypersingular Integral Equation Seismic Wave&Electro-magneto-thermo-elastic Fields Parallel CPU-GPU Technology
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Preface 认领 引用
5
《Journal of Computer Science & Technology》 SCIE EI 2007年第3期337-337,共1页
Recent years witness an increased awareness of the value of both metrics data collection and measurement method standardization to software organizations. This trend is coupled with the commitment of both researchers ... Recent years witness an increased awareness of the value of both metrics data collection and measurement method standardization to software organizations. This trend is coupled with the commitment of both researchers and practitioners to adapt existing measurement methods to new technology projects. For example, the creation of large empirical databases of software projects, such as the ISBSG （International Software Benchmarking Standards Group）, of new functional size measurement standards such as COSMIC Full Function Points （FFP）, 展开更多
关键词 The 7th International Symposium on Advanced Parallel Processing Technologies Nov.22-23,2007,Guangzhou,China,http appt07.gdut.edu.cn
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